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The "Opinions on the Development of Semiconductor Lighting Energy-Saving Industry" clearly proposes to improve the independent innovation capability of enterprises, realize the localization of large-scale MOCVD equipment, and innovate through the introduction and digestion, and jointly focus on the core technologies such as MOCVD equipment. So what are the difficulties in developing equipment in China? What level is it now? What should be done in the future?
"Extension and equipment are the lifeblood of the entire industry chain, which determines the development of the entire industry." Li Gang, the general manager of Shanghai Lanbao, said in a speech at a meeting. However, it is such a core equipment MOCVD (metal organic source chemical vapor deposition equipment) related to the lifeline of industrial development. So far, China is still completely dependent on imports.
In order to change this situation and improve the localization level of key equipment in China, the “Opinions on the Development of Semiconductor Lighting Energy-Saving Industry†jointly issued by the six ministries and commissions also clearly proposed to improve the independent innovation capability of enterprises and realize the localization of large-scale MOCVD equipment. The introduction of digestion and absorption and innovation, combined with the parties to focus on the core technologies such as MOCVD equipment.
It is imperative to develop localized equipment
MOCVD is a key device for the preparation of gallium nitride-based light-emitting diodes and laser epitaxial wafers, as well as a mainstream device for the production of optoelectronic materials and devices such as gallium arsenide and indium phosphide. At present, MOCVD equipment manufacturers MOX equipment produced by AIXTRON (Germany Ai Siqiang) and VEECO (American company Yiwei Precision Instrument Co., Ltd.) account for almost 90% of the global market share. China's production MOCVD equipment is completely at home. Depends on the state of the import. "In order to have pricing power and voice in the world, China's semiconductor lighting industry needs to make rapid breakthroughs in high-end fields such as equipment," said Liu Wendi, chairman of Shanghai Blu-ray, in an interview. Material preparation is closely related to MOCVD equipment. "The process of LED epitaxial fabrication is solidified on MOCVD and becomes the core of material preparation. If China does not have the ability to manufacture MOCVD, this will inevitably affect the mass production of epitaxial materials in China." An industry insider analyzed. Nowadays, in addition to the ability of a few Japanese companies to grow their own epitaxial and self-developing MOCVD equipment, the extension companies in mainland China, Taiwan, and South Korea basically purchase standard MOCVD equipment.
"Because many chip companies purchase standard MOCVD equipment, the epitaxial materials and chip technology are similar, which makes many chip companies fall into homogenization." Industry experts analyzed that the world's high-quality, high-efficiency lighting extension Films must generally be achieved by modifying standard equipment and processes, so China must now have the ability to retrofit MOCVD equipment, and this will also lay the foundation for manufacturing MOCVD equipment in China.
In addition, the high price of semiconductor lighting products has been recognized by the industry as one of the bottlenecks restricting its large-scale promotion. According to statistics, in the cost of epitaxial chip fabrication, MOCVD equipment depreciation and power account for about 13%. High equipment costs are one of the key factors preventing the decline in finished product prices. "The high price of chips has made China's enterprises less competitive and their profit margins have narrowed. If domestically produced equipment is used, it is hopeful that the production cost of the products will be greatly reduced." Industry experts analyzed the price of MOCVD equipment from foreign manufacturers. High standards have become a key factor constraining the cost reduction of semiconductor lighting products in China.
The foreign market monopoly of MOCVD equipment has seriously restricted and affected the healthy development of China's semiconductor lighting industry. At present, the mainstream equipment of the MOCVD industry has been developed from the original three-chip machine to the current 42, 45, and 49-piece machines, and the speed of technology update is accelerating. However, China's research and development is still far behind the pace of foreign development. "The monopoly of foreign companies on the market has seriously affected the enthusiasm of domestic enterprises to develop MOCVD equipment. Coupled with the rapid development of foreign technology and equipment, the localization equipment is difficult to open the market under the double pressure, which has severely inhibited China. The development of domestic equipment," said industry expert Professor Xu Xiangang.
China has already possessed MOCVD equipment research and development capabilities
The MOCVD equipment at the tip of the industrial chain is the most difficult part of the industry's recognized technology. The "Opinions" also put forward clear goals, pointing out that "in 2015, China's semiconductor lighting enterprises' independent innovation capability was significantly enhanced. Large-scale MOCVD equipment, key raw materials and more than 70% of the chips were localized, and upstream chip scale production enterprises 3 ~ 5." Industry analysts pointed out that the development and production of domestic MOCVD equipment, improve the localization rate of MOCVD equipment, not only can meet the growing market demand, but also can reduce the investment threshold of LED industrialization development, objectively promote the entire LED industry development of.
However, MOCVD equipment is a large-scale project integrating semiconductor materials, fluid mechanics, chemistry, mechanics, vacuum, circuit and automation control. It requires the coordinated research of multidisciplinary technicians. China has arranged MOCVD R&D projects as early as in the “Ninth Five-Year Plan†and “Tenth Five-Year Plan†863 Programs. In the “Eleventh Five-Year Plan†863 Program, MOCVD equipment localization has been included in the key support direction. With the support of national policies, China has achieved initial results in the localization of MOCVD equipment: the 48th Research Institute of China Electronics Technology Group Corporation and Nanchang University jointly developed and successfully developed through measures such as digestion and absorption and innovation of key technologies. A 6-inch 2-inch GaN production MOCVD device was grown at a time, but the equipment was not released to the market, and the cooperation team was disbanded. The Institute of Semiconductors of the Chinese Academy of Sciences also successfully developed a 7-inch 2-inch substrate with independent knowledge after years of research and development. The MOCVD equipment production prototype of the property rights, but still under the system of the research institute, requires equipment manufacturers and users to participate in the enterprise operation. At the same time, Qingdao Jiesheng Electric Co., Ltd. and other units are also developing research-type MOCVD equipment for deep ultraviolet.
An industry insider said that the simplest GaN blue LED single-sub-well structure growth process includes dozens of process steps such as high temperature baking, buffer layer, recrystallization, etc. Each step requires adjustment of multiple process parameters, process Very complicated. However, the current production equipment companies are difficult to obtain process verification, lack of process verification equipment, epitaxial chip manufacturers do not dare to buy, which has become one of the main problems of MOCVD R & D and production disconnection, the most productive process of China's MOCVD equipment Blocked. If it is supported by the state, it will be led by the manufacturers who make the process, and jointly developed together with the manufacturers who make the equipment. This will advance faster. But now from the perspective of cost accounting and risk management, many companies are still reluctant to purchase domestically produced equipment. Liu Wendan said that even if the domestically produced equipment is produced, it may face the flaws of no buyers. The price of a production MOCVD equipment is as high as 10 million to 20 million yuan, and the extension manufacturers are very cautious in purchasing such equipment. It is more willing to purchase imported equipment with mature technology and perfect after-sales service, which makes the promotion of domestic MOCVD equipment in a state of flux.
However, through years of accumulation, China has also the ability and foundation to develop supporting extension technology on large-scale production-type epitaxial furnaces. "The accumulation of talents in China. The development of R&D is growing, the processing capacity is significantly improved, and all technical obstacles have been broken. The ability to produce equipment has been established. Xu Xiangang said, but how to integrate the advantages of all parties to get out of the bottleneck of industrialization is The important problems facing the industrialization of equipment production in China.
Industrialization of domestic equipment needs to be institutionalized
Because the research and development of domestic MOCVD equipment is still in the stage of “digestion and absorptionâ€, with the development of foreign MOCVD technology, the threshold for the development of industrialized MOCVD equipment in China is getting higher and higher, facing the test of foreign patent barriers, and also exalting the strength of the country. To jointly overcome difficulties. The "Opinions" also pointed out that it is necessary to innovate through the introduction, digestion and absorption, and all parties must focus on the core technologies such as MOCVD equipment.
"Locating the most advanced products in foreign countries, introducing digestion, absorption and innovation, this method is in line with the current development of the industry." Xu Xiangang said that the most important thing at this stage is to do a good job in organization and management. The government should deploy globally on the localization of MOCVD equipment, publicly convene top-level talents nationwide, and let domestic enterprise users and equipment manufacturers unite to introduce clear guiding policies to encourage extensional production enterprises to adopt localized equipment to accelerate the market. Process. In addition, because the ultimate goal of equipment production is to face the market, the development of products must be industrialized. "Only open thinking, flexible mechanisms, and the combination of domestic technological forces can promote the localization of important equipment in China." Xu Xiangang said.
However, to solve the industrialization problem of MOCVD equipment, "the most important thing is to change the promotion ideas and systems of equipment development in China." Liu Wendan said. In the past, China has adopted the project project system in the promotion of the core technology of MOCVD equipment. In the end, it is basically the project identification and project identification. The scientific research achievements and industrialization cannot be well combined. Therefore, it is necessary to break the way that the research institutions promote separately. Let the epitaxial process enterprises and equipment R&D units with strong strength concentrate their efforts and establish a joint study of industry, academia and research in the true sense. "The state can also sign a military order with the supporting enterprises. If the enterprise can't develop the pre-products and realize the industrialization, then the funds supported by the state should be returned. This will give the company pressure on the project management and enhance the determination of everyone to do things." Liu Wendi said.
In the face of the current international equipment manufacturing plants, the production of larger-sized, multi-piece epitaxial growth equipment is the direction of improvement. In order to ensure that the products developed by relevant scientific research institutions meet the industrialization needs, they will become the mainstream models for future use. Some experts also suggested that the development of MOCVD equipment should be boldly broken on the existing basis, aiming at the research and development of the single-machine capacity in the mainstream market after three years, cultivating the extension talents on MOCVD with independent intellectual property rights, developing the extension technology, and fundamentally guaranteeing the semiconductor in China. The sustainable development of the lighting industry will enhance the competitiveness of China's semiconductor lighting industry. 
RJ45 is a type of different connectors (for example: RJ11 is also a type of connector, but it is used on the telephone); there are two different ways to arrange the RJ-45 connector: one is white orange, orange, white green, blue, white blue, green, white brown, brown; the other is white green, green, white orange, blue, white blue, orange, white brown, brown; therefore, there are also wires with RJ45 connector There are two kinds: straight line and interleaved line.
The RJ-45 port of the hub can be directly connected to terminal devices such as computers and network printers, and can also be connected with other hub equipment and routers such as switches and hubs. It should be noted that when connecting to different devices, the jumper method of twisted pair cable used is different.